Bársony I, Marton D, Giber J. DETERMINATION OF Na CONTENT OF MOS OXIDE LAYERS BY MEANS OF COMBINED SIMS AND BT INVESTIGATIONS Period. Polytech. Chem. Eng. [Internet]. 1981 Jan. 1 [cited 2024 May 19];25(1):15-21. Available from: https://pp.bme.hu/ch/article/view/2960