HOFFMANN G, VESZPRÉMI T, NAGY A. PROPERTIES OF IR SPECTRA OF PHOSPHORUS DOPED SiO₂ FILMS Period. Polytech. Chem. Eng. [Internet]. 1979 Jan. 1 [cited 2024 May 18];23(3):175-84. Available from: https://pp.bme.hu/ch/article/view/3035