DEVELOPMENT OF AN X-BAND SCATTEROMETER

Abstract

In this paper a brief description will be given about the structure of scatterometer systems, the main principles on which these instruments are based and the areas where scatterometers can be used. The microwave, analogue and digital circuits of the scatterometer that has been built will be presented. The I/Q detector that is the base of the whole system, the modelling of the detector, theb differences between the ideal and the real detectors and the problems caused by these differences during the measurement are in the scope of the paper. Finally some advantages and possibilities of the computerised data processing will be shown.