RON-BEAM DEBUG AND FAILURE ANALYSIS OF INTEGRATED CIRCUITS

Abstract

A current research project at IMAG/TIM3 Laboratory aims at an integrated test system combining the use of the Scanning Electron Microscope (SEM), used in voltage contrast mode, with a new high-level approach of fault location in complex VLSI circuits, in order to reach a complete automated diagnosis process. Two research themes are induced by this project, which are: prototype validation of known circuits, on which CAD information is available, and failure analysis of unknown circuits, which are compared to reference circuits. For prototype validation, a knowledge-based approach to fault location is used. Concerning failure analysis, automatic image comparison based on pattern recog- nition techniques is performed. The purpose of the paper is to present these two methodologies, focusing on the SEM-based data acquisition process.