Measurement of the dopant distribution in thin epitaxial si and GaAs structures

Authors

  • Péter Gottwald
  • András Ámbrózy

How to Cite

Gottwald, P., Ámbrózy, A. “Measurement of the dopant distribution in thin epitaxial si and GaAs structures”, Periodica Polytechnica Electrical Engineering, 24(1-2), pp. 11–19, 1980.

Issue

Vol. 24 No. 1-2 (1980)

Section

Articles