SILICON INTEGRATED CIRCUIT FABRICATION PROCESS MODELLING AND SIMULATION

Authors

  • Kálmán Tarnay
  • Ferenc Masszi
  • Balázs Kovács
  • Toomas Rang
  • Győző Drozdy
  • János Mizsei
  • Pál Baji

How to Cite

Tarnay, K., Masszi, F., Kovács, B., Rang, T., Drozdy , G., Mizsei , J. “SILICON INTEGRATED CIRCUIT FABRICATION PROCESS MODELLING AND SIMULATION ”, Periodica Polytechnica Electrical Engineering, 24(1-2), pp. 109–113, 1980.

Issue

Vol. 24 No. 1-2 (1980)

Section

Articles