On a Semianalytic Approach for Capacitance Calculation of Interconnects in High Speed Integrated Circuits

Abstract

This paper describes a fast and accurate semi-analytical procedure for determining capacitance and inductance of multilayer structures with multiple conductors with zero thickness in the top layer. The technique uses the quasi-analytic electrostatic Greens function of multilayer structures, which is integrated to a series expansion valid for uniform charge distributions. The quasi-analytical evaluation of the entries of the Galerkin matrix leads to a very efficient and accurate computer code. Computed results are given for some cases of integrated circuit interconnects to show the advantages and simplicity of our procedure as compared to the methods available in the literature.