KÁRPÁTI, Tamás; PAP, Andrea Edit; KULINYI, Sándor. Prototype MEMS Capacitive Pressure Sensor Design and Manufacturing. Periodica Polytechnica Electrical Engineering and Computer Science, [S. l.], v. 57, n. 1, p. 3–7, 2013. 10.3311/PPee.2066. Disponível em: https://pp.bme.hu/eecs/article/view/2066. Acesso em: 22 jul. 2024.