MARÁK, Károly. Characterization of the Inverse Problem in Critical Dimension Measurement of Diffraction Gratings. Periodica Polytechnica Electrical Engineering and Computer Science, [S. l.], v. 60, n. 3, p. 187–193, 2016. 10.3311/PPee.9310. Disponível em: https://pp.bme.hu/eecs/article/view/9310. Acesso em: 29 dec. 2024.