ANTAL, János; OROSZ, László. ON THE QUASI-THERMODYNAMICAL TREATMENT OF THE ENERGY DISTRIBUTION OF SPUTTERED PARTICLES Periodica Polytechnica Mechanical Engineering, [S. l.], v. 21, n. 3-4, p. 217–221, 1977. Disponível em: https://pp.bme.hu/me/article/view/5918. Acesso em: 18 may. 2024.