CALIBRATION OF SIMS MEASUREMENTS BY ION IMPLANTATION

Authors

  • J. Gyulai
  • I. Krafcsik
  • P. Riedel
  • F. Pavlyák
  • L. Bori
  • A. Sólyom

Abstract

The paper reviews some joint results of the above institutions in quantitative SIMS (Secondary Ion Mass Spectrometry) analysis of implanted dopants. Quantification of the SIMS was achieved by implanting marker ions as standards prior to analysis. Feasibility of this technique was first demonstrated by Giber et al. (1982). Further considerations will be presented.

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How to Cite

Gyulai, J., Krafcsik, I., Riedel, P., Pavlyák, F., Bori, L., Sólyom, A. “CALIBRATION OF SIMS MEASUREMENTS BY ION IMPLANTATION ”, Periodica Polytechnica Chemical Engineering, 34(1-3), pp. 81–86, 1990.

Issue

Vol. 34 No. 1-3 (1990)

Section

Articles