CALCULATION OF SWITCHING SPEED OF A CAPACITIVE MICRO-SWITCH BY ANALYTICAL AND FINITE ELEMENT METHODS
Abstract
The switching speed of a micromachined switch is calculated by using elastic beam as well as thin plate models. The effect of pre-tightening to achieve higher eigenfrequency of the deflected member is also investigated. A performance parameter is introduced to describe the functioning of the switch in order to take into account not only fast switching, but also the necessary pull-in voltage for the device. Three switch-configurations are analyzed by finite elements and optimum geometrical parameters were searched.
Keywords:
MEMS, capacitive micro-switch, design optimization, finite, elementsHow to Cite
Kovács, Ádám “CALCULATION OF SWITCHING SPEED OF A CAPACITIVE MICRO-SWITCH BY ANALYTICAL AND FINITE ELEMENT METHODS”, Periodica Polytechnica Mechanical Engineering, 48(1), pp. 55–63, 2004.
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