ON THE QUASI-THERMODYNAMICAL TREATMENT OF THE ENERGY DISTRIBUTION OF SPUTTERED PARTICLES

Authors

  • János Antal
  • László Orosz

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How to Cite

Antal, J., Orosz, L. “ON THE QUASI-THERMODYNAMICAL TREATMENT OF THE ENERGY DISTRIBUTION OF SPUTTERED PARTICLES ”, Periodica Polytechnica Mechanical Engineering, 21(3-4), pp. 217–221, 1977.

Issue

Vol. 21 No. 3-4 (1977)

Section

Articles