Characterization of the Inverse Problem in Critical Dimension Measurement of Diffraction Gratings

Authors

  • Károly Marák
    Affiliation
    Budapest University of Technology
https://doi.org/10.3311/PPee.9310

Abstract

In this paper, the inverse problem of extracting critical dimensions of the grating is defined, using data obtained by ellipsometric spectrometry. We give an overview of theoretical models describing diffraction gratings and their interactions with incident light, with a special emphasis on the coupled-wave method. A method for mapping the output space (points on Poincaré’s sphere defined by the ellipsometric angles for each wavelength) to the input space (grating dimensions) is presented, where samples of the output space are picked equidistantly. Using this method, distribution of the measurement precision for a given type of experimental setup is established, and tested on examples from a set of permalloy gratings.

Keywords:

inverse problem, diffraction grating, coupled-wave method

Citation data from Crossref and Scopus

Published Online

2016-07-05

How to Cite

Marák, K. “Characterization of the Inverse Problem in Critical Dimension Measurement of Diffraction Gratings”, Periodica Polytechnica Electrical Engineering and Computer Science, 60(3), pp. 187–193, 2016. https://doi.org/10.3311/PPee.9310

Issue

Section

Articles